XeF2 Release Etch

XeF2 Release Etch


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CVE New Query Now

CVE

The CVE module has a unique chamber design which provides high etch rates, uniformity and efficiency..

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e2 New Query Now

e2

Built for simplicity, low cost of ownership and a small footprint, the Xactix® e2TM is the..

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X4 New Query Now

X4

The Xactix® X4 SeriesTM is the leading XeF2 etch system for releasing MEMS devices. I..

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